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The XE-100 is a versatile system that is a combined Atomic Force Microscope (AFM), Scanning Probe Microscope (SPM) and Scanning Tunneling Microscope (STM) that provides atomic resolution imaging of nanostructures. This XE-100 AFM/SPM provides the most accurate way to scan the samples with ultimate AFM resolution and reliability via non-contact mode. The system has advanced scan system, on-axis optical viewing with the highest optical resolution (1 micron), flexible sample handling (accommodating samples up to 100 mm in diameter and 20 mm in thickness and weighing up to 500 grams), and true Non-Contact imaging. This AFM can achieve the ultimate resolution of AFM since the sharp end of a tip is preserved in True Non-Contact imaging mode unlike in contact or intermittent (also known as tapping) imaging modes. With motorized focus for on-axis optics, XE-100 provides added versatility to the operation of AFM within the acoustic enclosure. The key feature that enables true Non-Contact Mode is the ultra high force z-scanner that allows a significantly higher resonance frequency than those of conventional piezoelectric tube scanners.