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The work we do is focused on the fabrication, imaging, and characterization of nanoscale devices. Please click on the thumbnail below for a photo gallery and detailed description of the specific equipment.
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DCA New Nanotube Deposition System
DCA Instruments has developed a chemical vapor deposition (CVD) system for Carbon nanotube (CNT) deposition. The first system has been delivered to the University of Nevada Las Vegas. The deposition system includes a UHV chamber with substrate manipulator, plasma source and a gas manifold. Standard DCA linear sample transfer system is used for substrate loading and unloading. The linear sample transfer system allows the CNT chamber to be connected to various DCA deposition systems including MBE, PLD and sputtering chambers. This allows substrate and catalyst preparation in a dedicated deposition chamber followed by substrate transfer under UHV into the CNT chamber. The CNT system is a flexible research tool which provides the possibility to study the deposition of vertically aligned carbon nanotubes on various substrates and catalysts.
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© 2007 Nevada Nanotechnology Center • University of Nevada, Las Vegas
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